- E-beam resist
- Glass&quartz wafer
- Micro-fluidic device and Reactor
- 玻璃激光焊接设备
- Glass&quartz micro-machining
- Micro milling
- Add: Room 1909, TongDianMingJu Building B, No.1 South Street, BaLiQiao, Tongzhou District, Beijing.
- Tel: 010-65479350
- Fax: 010-65479309
- Email: info@ginkoo-mems.com
Micro-hole processing
- Wafer size:4”6”8”12”
- Thickness:300um-2mm
- Product description:
Product introduction
Parameter specification:
Materials:Glass,Slicon,Fused Silica,Sapphire.Alumina ceramics.
Wafer size: 100 - 200 mm。
Thickness: 200 µm - 2mm。
Minimum hole size:30um。
Hole size tolerance:±0.02mm。
Chipping: ≦100μm
Cross-section shape: Straight & Taper